Outline

  • Abstract
  • Pacs
  • Keywords
  • 1. Introduction
  • 2. Small Cantilevers
  • 3. High Rigidity Scanner Design
  • 4. Data Acquisition
  • 5. Conclusion
  • Acknowledgments
  • References

رئوس مطالب

  • چکیده
  • 1. مقدمه
  • 2. کنسول های پایه ای کوچکتر
  • 3. طراحی اسکن با استحکام بالا
  • 4. اکتساب داده
  • 5. نتیجه گیری

Abstract

Many applications in materials science, life science and process control would benefit from atomic force microscopes (AFM) with higher scan speeds. To achieve this, the performance of many of the AFM components has to be increased. In this work, we focus on the cantilever sensor, the scanning unit and the data acquisition. We manufactured 10 μm wide cantilevers which combine high resonance frequencies with low spring constants (160–360 kHz with spring constants of 1–5 pN/nm). For the scanning unit, we developed a new scanner principle, based on stack piezos, which allows the construction of a scanner with 15 mm scan range while retaining high resonance frequencies (>10 kHz). To drive the AFM at high scan speeds and record the height and error signal, we implemented a fast Data Acquisition (DAQ) system based on a commercial DAQ card and a LabView user interface capable of recording 30 frames per second at 150 * 150 pixels. PACS 07.79.Lh62.25.+g87.64.Dz85.85.+j

Keywords: - -

Conclusions

In this work, we have described several improvements we have made for high speed AFM. Using small cantilevers (10 mm wide, 100 nm thick), we increase the bandwidth of the cantilever and reduce its noise power density. A new scanner design concept allows higher scan speeds while still retaining a 15 um scan size. These two improvements can be used individually, as each will allow an increase of the scan speed compared to conventional systems. A combination of the two, together with the use of a faster DAQ system and improved control methods, will allow for further increases of the scan speed

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